File:Process Flow Trilayer Ebeam Resist.docx

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Process_Flow_Trilayer_Ebeam_Resist.docx ‎(file size: 208 KB, MIME type: application/vnd.openxmlformats-officedocument.wordprocessingml.document)

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Process flow for MMA/Ge/ZEP7000 trilayer stack for proximity-error correction-free e-beam writing.

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current10:57, 6 August 2013 (208 KB)Tigre (talk | contribs)Process flow for MMA/Ge/ZEP7000 trilayer stack for proximity-error correction-free e-beam writing.

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