File:IBE-Si-ER-contour.jpg

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IBE etch rate only shows a dependency on Beam Current and Beam Voltage. Values found on the plot should always be tested before use.

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current09:57, 10 December 2012Thumbnail for version as of 09:57, 10 December 20121,890 × 1,417 (810 KB)Khr (talk | contribs)IBE etch rate only shows a dependency on Beam Current and Beam Voltage. Values found on the plot should always be tested before use.

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