File:IBE-Si-CA-contour.jpg
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The angle in the corner of an etch structure showed a dependency on Beam and Acc. Voltage and Incident angle, with no interactions between any parameters. Values found on the plot should always be tested before use.
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Date/Time | Thumbnail | Dimensions | User | Comment | |
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current | 08:59, 10 December 2012 | 1,890 × 945 (725 KB) | Khr (talk | contribs) | The angle in the corner of an etch structure showed a dependency on Beam and Acc. Voltage and Incident angle, with no interactions between any parameters. Values found on the plot should always be tested before use. |
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