File:IBE-Si-CA-contour.jpg

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The angle in the corner of an etch structure showed a dependency on Beam and Acc. Voltage and Incident angle, with no interactions between any parameters. Values found on the plot should always be tested before use.

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current08:59, 10 December 2012Thumbnail for version as of 08:59, 10 December 20121,890 × 945 (725 KB)Khr (talk | contribs)The angle in the corner of an etch structure showed a dependency on Beam and Acc. Voltage and Incident angle, with no interactions between any parameters. Values found on the plot should always be tested before use.

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