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• 11:54, 8 September 2023 Thope talk contribs created page Specific Process Knowledge/Lithography/EBeamLithography/EBLProcessExamples (Created page with "This page is under construction. In time we will fill it with relevant process examples and relevant data. =Single spot EBL= Arrays of circular holes can be created by normal area writing of a mask of circular structures. It can however also be done with a single spot approach, where the beam will dwell at each spot for several µs and hence each spot will become a circular structure by local over exposure. You can read more about this method in the linked article. '''...")