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• 14:28, 6 December 2022 Bghe talk contribs created page Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/Slow etch (Created page with "=The slow etch= The slow etch is designed to etch slow at low powers to etch thin films and to avoid overheating of samples mounted on a carrier with Capton/polyimide tape")