Specific Process Knowledge/Etch/Etching of Chromium
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Revision as of 15:06, 12 March 2013 by BGE (talk | contribs) (→Comparison of Aluminium Etch Metodes)
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Etching of Chromium
Etching of chromium can be done either by wet etch, dry etch or by sputtering with ions.
Comparison of Aluminium Etch Metodes
Cr wet etch 1 | Cr wet etch 2 | ICP metal | IBE (Ionfab300+) | |
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Generel description | Wet etch of Cr that you need to mix your self | Wet etch of Cr premixed | Dry plasma etch of Cr | Sputtering of Cr - pure physical etch |
Etch rate range |
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Etch profile |
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Substrate size |
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Smaller pieces glued to carrier wafer
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Allowed materials |
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