Specific Process Knowledge/Etch/Etching of Chromium
Jump to navigation
Jump to search
THIS PAGE IS UNDER CONSTRUCTION
Feedback to this page: click here
Etching of Chromium
Etching of chromium can be done either by wet etch, dry etch or by sputtering with ions.
Comparison of Aluminium Etch Metodes
Cr wet etch 1 | Cr wet etch 2 | ICP metal | IBE (Ionfab300+) | |
---|---|---|---|---|
Generel description | Wet etch of pure Al | Wet etch of Al + 1.5% Si | Dry plasma etch of Al | Sputtering of Al - pure physical etch |
Etch rate range |
|
|
|
|
Etch profile |
|
|
|
|
Substrate size |
|
|
|
Smaller pieces glued to carrier wafer
|
Allowed materials |
|
|
|
|