Specific Process Knowledge/Etch/Etching of Aluminium
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Revision as of 10:56, 12 March 2013 by BGE (talk | contribs) (→Comparison methode 1 and methode 2 for the process)
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Etching of Aluminium
Etching of aluminium can be done either by wet etch, dry etch or by sputtering with ions.
Comparison methode 1 and methode 2 for the process
Al wet etch 1 | Al wet etch 2 | Al etch by ICP metal | Al sputtering by IBE (Ionfab300+) | |
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Generel description | Generel description - methode 1 | Generel description - methode 2 | ||
Parameter 1 |
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Parameter 2 |
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Substrate size |
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Allowed materials |
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