Specific Process Knowledge/Characterization

Choose topic

• Surface imaging
• Topographic measurement
• Stress measurement
• Filmthickness measurement
• Element analysis
• Measurement of optical constants
• Hydrophobicity measurement
• Resistivity measurement
• Wafer thickness measurement

Choose equipment

SEM: Scanning Electron Microscopy

• LEO SEM
• FEI SEM
• JEOL SEM

Profiler

• Tencor
• Dektak 8 stylus profiler

Optical characterization

• ellipsometer
  • Filmtek
  • prism coupler