Specific Process Knowledge/Etch/DRIE-Pegasus/TrenchCharacterisation

Parameters

	In the image the following parameters are shown: Top Width (TW) Depth (D) Bottom Width (BW) Mid Width (MW) To speed up the characterisation post-SEM the parameter 'Pixel Size' (PS) is added to the SEM databar.
	Depth
	$\sum _{n=0}^{\infty }{\frac {x^{n}}{n!}}$