Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy

At the moment we have three SEM's. Together they cover a wide range of needs in the cleanroom: From the fast in-process verification of different process parameters such as etch rates, step coverages or lift-off quality to the ultra high resolution images on any type of sample intended for publication.

The SEM that will cover most users needs is the Leo SEM. It is a very reliable and rugged