Specific Process Knowledge/Characterization/Topographic measurement

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Revision as of 12:01, 20 November 2007 by BGE (talk | contribs) (New page: Topographic measurements are measurements were you can measure hight differences on your substrate. If you measure in many spots of you substrate you can get a topographic image of your su...)
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Topographic measurements are measurements were you can measure hight differences on your substrate. If you measure in many spots of you substrate you can get a topographic image of your substrate.

AT DANCHIP we have three systems for topographic measurement:

  • Tencor - Profiler for measuring micro structures
  • Dektak - Profiler for measuring micro structures
  • Nanoman - AFM for measuring nano structures
Tencor Dektak Nanoman
General description
Max. scan range xy
Max. scan range z
Resolution xy
Resolution z
Min. feature size
Max. aspect ratio
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