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Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch)/Quartz etch using AOE

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< Specific Process Knowledge | Etch | AOE (Advanced Oxide Etch)

Revision as of 08:46, 9 August 2011 by BGE (talk | contribs) (→Nanoetch in quartz 65mmx65mmx6.25mm substartes)

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Nanoetch in quartz 65mmx65mmx6.25mm substrates

by bge@danchip

Some priliminary results

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