Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE Ti etch
Results from the acceptance test in February 2011
Acceptance test for Ti etch:
. | Acceptance Criteria |
Acceptance Results |
---|---|---|
Substrate information |
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. |
Material to be etched |
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. |
Mask information |
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. |
Features to be etched |
|
. |
Etch depth |
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Etch rate |
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|
Etch rate uniformity |
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Reproducibility |
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Selectivity (Au etch rate/ZEP etch rate) |
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|
Etch profile |
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