Specific Process Knowledge/Pattern Design/Travka/fields/Aline

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The A-line field

Definition of the measures used in the table below

The A-line fields have trenches of different widths across the entire 1 cm height of the field. The pitch of the trenches is matched to the exposed area of each mask. The list of trench widths in each field is the same on all masks (due to the high exposed area the widths 2 and 3 µm are missing on the travka 65 mask, on the 80 mask the lines 2, 3, 4 and 6 are missing).

The A-line fields are located along a cleavage line on the wafer with T-ridge fields. Cleaving across these two types of fields provide the possibility of inspecting trench depths and widths as a function of exposed area.

Travka 05 A-line field

Travka 05: A-line 2 µm to 25 µm fields Trench width (µm) Ridge width (µm) Period width (µm) Total periods Width of array (µm) 2 38 40 2 80 3 57 60 3 180 4 76 80 2 160 6 114 120 1 120 8 152 160 1 160 10 190 200 1 200 15 285 300 1 300 25 475 500 1 500

Travka 05: A-line 40 µm to 300 µm fields Trench width (µm) Ridge width (µm) Period width (µm) Total periods Width of array (µm) 40 760 800 1 800 50 950 1000 1 1000 75 1425 1500 1 1500 100 1900 2000 1 2000 150 2850 3000 1 3000 200 3800 4000 1 4000 300 5700 6000 1 6000

Travka 10 A-line field

Travka 10: A-line 2 µm to 25 µm fields Trench width (µm) Ridge width (µm) Period width (µm) Total periods Width of array (µm) 2 18 20 25 500 3 27 30 30 900 4 36 40 30 1200 6 54 60 10 600 8 72 80 10 800 10 90 100 10 1000 15 135 150 5 750 25 225 250 5 1250

Travka 10: A-line 40 µm to 300 µm fields Trench width (µm) Ridge width (µm) Period width (µm) Total periods Width of array (µm) 40 360 400 5 2000 50 450 500 2 1000 75 675 750 2 1500 100 900 1000 2 2000 150 1350 1500 1 1500 200 1800 2000 1 2000 300 2700 3000 1 3000

Travka 20 A-line field

Travka 20: A-line 2 µm to 25 µm fields Trench width (µm) Ridge width (µm) Period width (µm) Total periods Width of array (µm) 2 8 10 50 500 3 12 15 60 900 4 16 20 60 1200 6 24 30 20 600 8 32 40 20 800 10 40 50 20 1000 15 60 75 10 750 25 100 125 10 1250

Travka 20: A-line 40 µm to 300 µm fields Trench width (µm) Ridge width (µm) Period width (µm) Total periods Width of array (µm) 40 160 200 10 2000 50 200 250 4 1000 75 300 375 4 1500 100 400 500 4 2000 150 600 750 2 1500 200 800 1000 2 2000 300 1200 1500 2 3000

Travka 35 A-line field

Travka 35: A-line 2 µm to 25 µm fields Trench width (µm) Ridge width (µm) Period width (µm) Total periods Width of array (µm) 2 3,7 5,7 80 457,1 3 5,6 8,6 80 685,7 4 7,4 11,4 61 697,1 6 11,1 17,1 51 874,3 8 14,9 22,9 50 1142,9 10 18,6 28,6 50 1428,6 15 27,9 42,9 20 857,1 25 46,4 71,4 20 1428,6

Travka 35: A-line 40 µm to 300 µm fields Trench width (µm) Ridge width (µm) Period width (µm) Total periods Width of array (µm) 40 74,3 114,3 20 2285,7 50 92,9 142,9 10 1428,6 75 139,3 214,3 10 2142,9 100 185,7 285,7 10 2857,1 150 278,6 428,6 2 857,1 200 371,4 571,4 2 1142,9 300 557,1 857,1 2 1714,3

Travka 50 A-line field

Travka 50: A-line 2 µm to 25 µm fields Trench width (µm) Ridge width (µm) Period width (µm) Total periods Width of array (µm) 2 2 4 145 580 3 3 6 150 900 4 4 8 140 1120 6 6 12 50 600 8 8 16 50 800 10 10 20 50 1000 15 15 30 25 750 25 25 50 25 1250

Travka 50: A-line 40 µm to 300 µm fields Trench width (µm) Ridge width (µm) Period width (µm) Total periods Width of array (µm) 40 40 80 25 2000 50 50 100 10 1000 75 75 150 10 1500 100 100 200 10 2000 150 150 300 5 1500 200 200 400 5 2000 300 300 600 5 3000

Travka 65 A-line field

Travka 65: A-line 2 µm to 25 µm fields Trench width (µm) Ridge width (µm) Period width (µm) Total periods Width of array (µm) 2 1,1 3,1 0 0 3 1,6 4,6 0 0 4 2,2 6,2 144 892,8 6 3,2 9,2 120 1104 8 4,3 12,3 100 1230 10 5,4 15,4 100 1540 15 8,1 23,1 25 577,5 25 13,5 38,5 25 962,5

Travka 65: A-line 40 µm to 300 µm fields Trench width (µm) Ridge width (µm) Period width (µm) Total periods Width of array (µm) 40 21,5 61,5 25 1537,5 50 26,9 76,9 12 922,8 75 40,4 115,4 12 1384,8 100 53,8 153,8 12 1845,6 150 80,8 230,8 8 1846,4 200 107,7 307,7 8 2461,6 300 161,5 461,5 8 3692

Travka 80 A-line field

Travka 80: A-line 2 µm to 25 µm fields Trench width (µm) Ridge width (µm) Period width (µm) Total periods Width of array (µm) 2 0,5 2,5 0 0 3 0,8 3,8 0 0 4 1,0 5 0 0 6 1,5 7,5 0 0 8 2,0 10 96 960 10 2,5 12,5 90 1125 15 3,8 18,8 80 1504 25 6,3 31,3 50 1565

Travka 80: A-line 40 µm to 300 µm fields Trench width (µm) Ridge width (µm) Period width (µm) Total periods Width of array (µm) 40 10,0 50 50 2500 50 12,5 62,5 15 937,5 75 18,8 93,8 15 1407 100 25,0 125 15 1875 150 37,5 187,5 10 1875 200 50,0 250 10 2500 300 75,0 375 10 3750