Specific Process Knowledge/Etch/Titanium Oxide
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Etch of Titanium oxide has been test in the ICP metal etcher.
- Titanium Oxide etch using ICP metal
- Titanium Oxide etch using BHF
Comparison of Titanium Oxide (ALD) etch Methods 
| BHF | ICP Metal Etcher | |
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| Generel description | Wet etch of TiO2 (ALD) | |
| Etch rate range | 2,5 nm/min |
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| Etch profile |
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| Substrate size |
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| Allowed materials | In beaker:
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