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Etching of nanostructures in Si using ASE: pxnano2 recipe, time 96 secs (12 cycles), temp 20 degrees

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current12:24, 19 May 2011Thumbnail for version as of 12:24, 19 May 20111,024 × 768 (293 KB)Jml (talk | contribs)Etching of nanostructures in Si using ASE: pxnano2 recipe, time 96 secs (12 cycles), temp 20 degrees

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