LabAdviser/Courses/TPT Ebeam

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This online course is currently under prepration. It will include theory on electron beam lithography and equipment, as well as training in preparation of exposure files and equipment operation. The course will be a prerequisite for hands-on training on the electron beam tool.

There are currently a set of tutorials that we request new users to study prior to hands-on training.

Training for JEOL 9500

The training on the Jeol tool consists of 3 sessions.

Files training We normally show you how to prepare the files for an exposure. There are three different files that need to be prepared prior the exposure: sdf, jdf and v30. You should read the information about files preparation (info below) and have your pattern ready before this training. Feel free to attempt preparing the sdf and jdf files as well.
First exposure We show you how to operate the tool. Please read the information about My first JEOL 9500 exposure prior to this training and watch the our JEOL Training Tutorial.
Second exposure Throughout this training, you will independently operate the tool, and we will assess your ability to do so without assistance.
optional: Alignment If you at some point need to perform alignment, we recommend to plan an extra training. We do not advise alignment during the first training as it can become quite complicated. If you do need alignment during the first exposure, please let us know.

To get ready for the first training you will need to read the information in LabAdviser for the files’ preparation:

Creating the *.v30 file

To prepare the *.v30 file from your design, you will need to use a special software called "Beamer". You can access the software at the computers in the EBL room inside the cleanroom or in the "copy room" (building 346, room XXX). You can read more about how to use "Beamer" and how to create the design file under JEOL Job Preparation. For find more information about advanced features under Beamer. If you cannot manage to create the *.v30 files on your own, we will cover this during the "files training".

Creating the sdf and jdf files

To prepare the jdf and sdf files, we normally recommend using SuperEdi. It is a freeware and you can download here. You can find detailed explanation of how to create the *.jdf and *.sdf files under JEOL Job Preparation. You will also find some examples of the files and explanation of the different commands. To make the most of the training, we recommend you to try prepareing your *.jdf and *.sdf files before the files training. We will go through the files and discuss any possible mistakes.

There is more information on our electron beam lithography equipment available on Labadviser. Please feel free to browse through the information and do not hestiate to contact us at training@nanolab.dtu.dk if you have any questions.