Specific Process Knowledge/Pattern Design/CleWin

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Mask Design Software

At DTU Nanolab we offer all users of the cleanroom free access to CleWin 6 for their mask layout.

On 01 September 2024, our license for Clewin 5 expired and Clewin 6 is available instead. It is available as evaluation version and expires on 01 September 2025.

Find the official userguide to Clewin 6 (CleWin6Help.pdf) in your local CleWin6-installation directory. Standard directory: C:\Program Files\CleWin6.1 evaluation version (for Clewin 5: C:\Program Files (x86)\CleWin5).

To help you get started, we also offer a self study Mask Design course.

CleWin 6 - installation on your Windows PC

CleWin 6 can be downloaded from the cleanroom drive (typically mapped as O:\ drive):
\CleanroomDrive\_TPT\TPT Mask Design\For CleWin\CleWin 6 software\

Please copy the zip-file to your local drive, extract it and run the installation program CleWin61_64bit_evaluation_setup.exe (as administrator). After installation, start the program Clewin 6.

Note: Please uninstall Clewin when you finish your study at DTU. Each installation consumes one of our licenses.

Please contact Jesper Hanberg or training@nanolab.dtu.dk, if you have any problems or questions.

CleWin 6 - installation on your Apple or Linux computer

For this to work your need to run some kind of Windows emulator on you Apple or Linux machine. After having installed Windows, Clewin installation is the same as for Windows.

No guarantee for it to work!

CleWin 5 - video tutorial

Find a video tutorial here: https://www.youtube.com/watch?v=4mm2I9nLNTA