Template:Peg1Table9Head

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Revision as of 09:14, 11 November 2024 by Jmli (talk | contribs) (Created page with "{| {{{TableStyle}}} {{{PaddingStyle}}} |+'''{{{TableHeader}}}''' |- ! style="background:gainsboro; {{{PaddingStyle}}} color:black;" rowspan="4" | <span title="Recipe name" >Recipe</span> ! style="background:gainsboro; {{{PaddingStyle}}} color:black;" colspan="3" rowspan="2" | <span title="The General tab" >General</span> ! style="background:lime; {{{PaddingStyle}}} color:black;" colspan="3" rowspan="2"| <span title="The Pressure tab. Either (%) - fixed APC or (mTorr) -...")
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Recipe General Pressure Gases Generators Matching Results
C4F8 SF6 Coil Platen Coil Platen
T S/E Dp D B M D B M D B M Dp Dep L T L T Pressure Runs
H/L Cyc Et D B M D B M D B M Et D B M L T L T Keywords
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