Template:ProcessRunPeg1Head

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Revision as of 09:05, 11 November 2024 by Jmli (talk | contribs) (Created page with "{| {{{TableStyle}}} |+ '''{{{TableHeader}}}''' ! rowspan="2" {{{PaddingStyle}}} |<span title="The date of the run">Date</span> ! colspan="2" {{{PaddingStyle}}} |<span title="All necessary information about the substrate">Substrate information</span> ! colspan="5" {{{PaddingStyle}}} |<span title="All necessary information about the etch process">Process information</span> |- ! {{{PaddingStyle}}} |<span title="What pattern? Mask material and thickness ">Wafer info</span>...")
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{{{TableHeader}}}
Date Substrate information Process information
Wafer info Mask/exposed area Tool Conditioning Recipe Wafer ID Comments
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