Specific Process Knowledge/Pattern Design/CleWin

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Mask Design Software

At DTU Nanolab we offer all users of the cleanroom free access to CleWin 5/6 for their mask layout.

From September 2024 we switch to Clewin 6 which is a new optimized version of Clewin 5. If you know Clewin 5 you can directly use Clewin 6.

Find the official userguide to Clewin 5 in the CleWin 5/6 installation directory (C:\Program Files (x86)\CleWin5 or C:\Program Files\CleWin6.1 evaluation version) if you have made a local installation. We also offer a self study Mask design course. Find it here.

CleWin 6 - installation on your Windows PC - version available has expire date 1 September 2025

CleWin 5 software package
CleWin 5 software package
  • Install Clewin 6
  1. Clewin 6 can be found this way:
  2. In the "DTU Software Center" on your computer
  3. or alternatively you can copy this link to your Search button in Windows which will open a file explorer window: \\ait-pdfs\department\nlab\CleanroomDrive\_TPT\TPT Mask Design\For CleWin\CleWin 6 software\
  4. Copy the zip file to your local drive, extract it and
  5. Run the installation program CleWin5_64bit_Evalutation ... .exe as administrator!
  6. After installation start the program Clewin 6.
  7. This is an evaluation copy that will cease to work after August 31. 2025.


  • Note! please uninstall Clewin when you finish your study at DTU. Each installation consumes one of our licenses.

Please contact Jesper Hanberg if you have any problems.

CleWin 5/6 - installation on your Apple or Linux computer

For this to work your need to run some kind of Windows emulator on you Apple or Linux machine. After having installed Windows, Clewin installation is the same as for Windows.

No guarantee for it to work!

CleWin 5 - video tutorial

Find a video tutorial here: https://www.youtube.com/watch?v=4mm2I9nLNTA