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Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Nanoscale silicon nitride etch with SF6

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Nano scale etching of silicon nitride with SF6 plasma

Based on silicon etch recipe made by Henri Jansen

**silicon nitride etch**
Parameter	Recipe 1:Al2O3 etch platen only
SF₆ (sccm)	15
Pressure (mTorr)	5
Platen power (W)	20
Temperature (^oC)	20

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