Specific Process Knowledge/Lithography/EBeamLithography/ma-N 2400

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Revision as of 10:45, 31 May 2024 by Thope (talk | contribs) (Created page with "=Spin coating= ma-N 2400 can be spin coated on LabSpin 2 and 3 using the CSAR/PMMA bowlset. A spin curve for ma-N 2400.05 is provided below. Process parameters are: *Date: May 31st 2024 *Coater: LabSpin 2 *Substrate: 2" Si *Acceleration: 1000 RPM/s *Time: 60 s *Baking temperature: 90C (setpoint at 100C) *Baking time: 60 s {| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" |- | 800px |- | colspan="1" style="t...")
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Spin coating

ma-N 2400 can be spin coated on LabSpin 2 and 3 using the CSAR/PMMA bowlset. A spin curve for ma-N 2400.05 is provided below. Process parameters are:

  • Date: May 31st 2024
  • Coater: LabSpin 2
  • Substrate: 2" Si
  • Acceleration: 1000 RPM/s
  • Time: 60 s
  • Baking temperature: 90C (setpoint at 100C)
  • Baking time: 60 s

ma-N 2400.05 spin curve.

Resulting resist thickness can be determined as y = axb+c, where y is thickness [nm], x is spin speed [RPM], a = 1015400, b = -1.1 and c = 368.3.

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