File:WF 2C3feb2011-060.jpg

Size of this preview: 800 × 600 pixels. Other resolution: 1,024 × 768 pixels.

Original file ‎(1,024 × 768 pixels, file size: 240 KB, MIME type: image/jpeg)

Etching of nanostructures in Si using DRIE-Pegasus: nano1.0 recipe, Run ID 1801, time 120 secs, SF6 38, C4F8 52, 4mtorr, 800/50 coil/platen, 10 degs.

File history

Click on a date/time to view the file as it appeared at that time.

	Date/Time	Thumbnail	Dimensions	User	Comment
current	15:15, 24 March 2011		1,024 × 768 (240 KB)	Jml (talk \| contribs)	Etching of nanostructures in Si using DRIE-Pegasus: nano1.0 recipe, Run ID 1801, time 120 secs, SF6 38, C4F8 52, 4mtorr, 800/50 coil/platen, 10 degs.

You cannot overwrite this file.

The following page uses this file:

This file contains additional information, probably added from the digital camera or scanner used to create or digitize it.

If the file has been modified from its original state, some details may not fully reflect the modified file.

_error	0