Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/SiO2 Etch/Cr mask

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Unless otherwise stated, all content in this section was done by Berit Herstrøm, DTU Nanolab

• EM tests with Cr mask on full wafer 6 min etch
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• EM tests with Cr mask on wafer piece on Si carrier 6 min etch
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• EM tests with Cr mask on full wafer 6 min etch
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• 
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• EM tests with Cr mask on full wafer 6 min etch
• 
• 
• 
• 
• 
•