Specific Process Knowledge/Lithography/EBeamLithography/JEOLRequest
Request for user exposure slot
As of October 1st 2023 all exposure slots on the JEOL 9500 system are managed and delegated by the Nanolab EBL staff. In order to get an exposure slot users must request a slot by submitting a request form AND prepared job files for the exposure.
The request form can be found here. Please send the request to JEOL-request@nanolab.dtu.dk.
Request form guide
Request for exposure by Nanolab
At a later point in time we will open up for a limited service where Nanolab will carry out exposures on behalf of users.