Specific Process Knowledge/Lithography/EBeamLithography/JEOLRequest

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Revision as of 08:48, 8 September 2023 by Thope (talk | contribs) (Created page with "=Request for user exposure slot= As of October 1st 2023 all exposure slots on the JEOL 9500 system are managed and delegated by the Nanolab EBL staff. In order to get an exposure slot users must request a slot by submitting a request form AND prepared job files for the exposure. The request form can be found here. Please send the request to JEOL-request@nanolab.dtu.dk. ==Request form guide== =Request for exposure by Nanolab= At a later point in time we will open u...")
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Request for user exposure slot

As of October 1st 2023 all exposure slots on the JEOL 9500 system are managed and delegated by the Nanolab EBL staff. In order to get an exposure slot users must request a slot by submitting a request form AND prepared job files for the exposure.


The request form can be found here. Please send the request to JEOL-request@nanolab.dtu.dk.


Request form guide

Request for exposure by Nanolab

At a later point in time we will open up for a limited service where Nanolab will carry out exposures on behalf of users.