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1
Etching of silicon rich nitride (SRN) with recipes developed for SiO2 etching
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Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/Nitride Etch
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Specific Process Knowledge
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Etch
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DRIE-Pegasus
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Pegasus-4
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Etching of silicon rich nitride (SRN) with recipes developed for SiO2 etching
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