Specific Process Knowledge/Characterization/XPS/Access

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How to get access to the XPS

Unless otherwise stated, the content of this page was created by the dry etch group at DTU Nanolab

If you already a user at DTU Nanolab and have access to LabManager you must complete the access request form following the link below:

Theoretical background material

The course material of an XPS course offered at the Technical University of Munich explains the theory behind XPS. Read sections 1-4.3 (pages 1-16) of File:Electron Spectroscopy of surfaces.pdf.