Specific Process Knowledge/Wafer Information
Wafer Information
DTU Danchip has a stock of most used silicon and glass wafers; most of these wafers are to be found in stock in cleanroom 2. Whenever you take a wafer from stock, you should fill out the online logbook (server L) with date, name, company, project/team, waferbox name and price per wafer. The Price can also be found in the logbook.
The waferbox name consists of two characters and three to four numbers, eg OP337, according to the code below:
| Origin of waferbox names | ||
| O | P | 337 |
|---|---|---|
| Indicates the company where the wafers are bought | Type of doping in the wafer | shipment number |
Wafers available at DTU Danchip
| Wafers available at DTU Danchip | |||||
| Shelf | Size | Type | Thickness | Resistivity | |
|---|---|---|---|---|---|
| SSP (single side polished) | bottom | 4" | N+P | 525 µm | 1-20 Ωcm |
| SSP (single side polished) | top | 6" | N or P | 625 µm | 1-20 Ωcm |
| DSP (double side polished) | middle | 4" | N+P | 350 µm | 1-20 Ωcm |
| wafers with different layers | top | 4" and 6" | |||
| Boron glasswafers | middle | 4" | 1 mm | ||
Wafer boxes and single wafer carriers
New clean wafer boxes and single wafer carriers can be found in the changing area. Ask DTU Danchip personnel for help if stock is low