LabAdviser

LabAdviser is a process handbook for equipment and processes at the DTU Danchip cleanroom facilities. The function and capacity of each piece of equipment is described in detail and general process steps, eg photolithography procedures, are clarified. LabAdviser is meant to advise you to a good starting point for your cleanroom process for further optimization to meet your needs. To enter LabAdviser you need to log in. LabAdviser is only editable for Danchip employees. If you need further information about certain machinery or processes, please contact the Danchip personnel.

Contents

• Process flow approval
• Specific Process Knowledge
  • Photolithography
  • Thin film deposition
  • Etch
  • Wafer cleaning
  • Wafer and sample drying
  • Thermal process
  • Imprinting
  • Bonding
  • Back-end processing
  • Characterization
  • E-beam lithography
  • III-V Processes
• Substrates
• New equipment in the pipeline
• Old equipment for decommissioning
• Surveys and statistics