Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch)/Si etch using AOE

This page is under construction!!!

Si mask etch has been tried out by Yunhong Ding @ Fotonik

Parameter	Si_etch
Coil Power [W]	800
Platen Power [W]	30
Platen temperature [oC]	20
C$_{4}$F$_{8}$ flow [sccm]	55
SF$_{6}$ flow [sccm]	75
Pressure [mTorr]	20

Typical results	Resist mask
Si etch rate [nm/min]	~1.12my/min
Selectivity [:1]	~2.6
Profile [o]	not tested
Images	.
Comments	The profile is supposed to be ~88dg but it has not been confirmed