Specific Process Knowledge/Etch/Etching of Silicon

Etch of silicon can be done by either wet etch or dry etch. The standard setups for this here at DANCHIP are:

Wet etches:

• KOH etch
• Wet PolySilicon etch

Dry etches:

• Dry etch using RIE1 or RIE2
• Dry etch using ASE