Specific Process Knowledge/Thin film deposition/Deposition of Carbon

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Revision as of 20:03, 20 December 2022 by Eves (talk | contribs) (Replaced content with "== Deposition of Carbon == Carbon can be deposited by DC-sputtering method. So far the process has been tested only using Sputter-System (Lesker): *Deposition of Carbon in Sputter-System (Lesker)")

Deposition of Carbon

Carbon can be deposited by DC-sputtering method. So far the process has been tested only using Sputter-System (Lesker):