Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation/Pathlist

• • • Mask Exposure Peformance Test ***

MASK00: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE 
       CYCLIC  CURRNT,DRIFT
       CYCLE   5M

MASK01: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE 
       CYCLIC  CURRNT,DRIFT
       CYCLE   5M

• • • Direct Exposure Peformance Test ***

DIRE00: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE
       CYCLIC  CURRNT
       CYCLE   5M

DIRE01: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
       CYCLIC  CURRNT
       CYCLE   5M

• • • Minimum Line Exposure Peformance Test ***

MINI01: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
       CYCLIC  CURRNT,DRIFT
       CYCLE   5M

• • • Test Exposure ***

TEST00: INITIAL HEIMAP
TEST01: INITIAL CURRNT
TEST02: INITIAL HEIMAP,CURRNT
TEST03: INITIAL CURRNT,INITBE
TEST04: INITIAL HEIMAP,CURRNT,INITBE
TEST05: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
TEST06: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE
TEST07: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
TEST08:	INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE

TEST09: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
       CYCLIC  CURRNT,DRIFT
       CYCLE   1

TEST10: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE
       CYCLIC  CURRNT,DRIFT
       CYCLE   1

TEST11: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
       CYCLIC  CURRNT,DRIFT
       CYCLE   5M, F

TEST12: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
       CYCLIC  CURRNT,DRIFT
       CYCLE   5M, F

TEST13:	INITIAL INITAE,INITBE,CURRNT,PDEFBE

CYCLIC DRIFT CYCLE 1M, F

TEST14: INITIAL CURRNT
       CYCLIC  DRIFT
       CYCLE   99

DRIFT0:	INITIAL INITAE, INITBE

CYCLIC INITAE, INITBE, DRIFT, CURRNT CYCLE 1

DRIFT1:	INITIAL INITAE, INITBE

CYCLIC INITAE, INITBE, DRIFT, CURRNT CYCLE 1M,F

LONG01: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
       CYCLIC  CURRNT,DRIFT
       CYCLE   5M   
        
LONG02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
       CYCLIC  CURRNT,DRIFT,INITBE,PDEFBE,SUBDEFBE
       CYCLE   5M

MINI02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
       CYCLIC  CURRNT,INITBE
       CYCLE   20M

HEIGH1: INITIAL HEIMAP,CURRNT
       CYCLIC  CURRNT,DRIFT
       CYCLE   10M

MASK02:	INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE

CYCLIC DRIFT,CURRNT CYCLE 4

MASK03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
       CYCLIC  CURRNT,DRIFT
       CYCLE   5M

MASK04: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE
       CYCLIC  CURRNT,DRIFT
       CYCLE   5M

MASK05: INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
       CYCLIC  CURRNT,DRIFT
       CYCLE   5M

MASK06: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
       CYCLIC  INITBE,PDEFBE,SUBDEFBE,CURRNT,DRIFT
       CYCLE   5M

AUTO00:	INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE

DIRE02: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE   
 
DIRE03: INITIAL CURRNT,INITBE
       CYCLIC  CURRNT,DRIFT
       CYCLE   20M  
   
DIRE04: INITIAL CURRNT,INITBE,PDEFBE
       CYCLIC  CURRNT
       CYCLE   20M

DIRE05: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
       CYCLIC  CURRNT
       CYCLE   20M  
     
DIRE06: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,SUBDEFBE
       CYCLIC  CURRNT
       CYCLE   20M

DIRE07: INITIAL CURRNT,INITBE,PDEFBE,DISTBE,PDEFBE,SUBDEFBE
       CYCLIC  CURRNT
       CYCLE   20M

DRFT01: INITIAL CURRNT
       CYCLIC  DRIFT
       CYCLE   1

SBG01: 	INITIAL HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE

SBG02: 	INITIAL HEIMAP

SBG03: 	INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
       CYCLIC  CURRNT,DRIFT
       CYCLE   5M

SBG04: 	INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
       CYCLIC  CURRNT,DRIFT
       CYCLE   5M

SBG05: 	INITIAL CURRNT
       CYCLIC  CURRNT,DRIFT
       CYCLE   5M

SBG06: 	INITIAL HEIMAP
       CYCLIC  CURRNT,DRIFT
       CYCLE   5M

SBG07: 	INITIAL CURRNT
       CYCLIC  CURRNT,DRIFT
       CYCLE   34

TOK01: 	INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
       CYCLIC  CURRNT,DRIFT
       CYCLE   20M

G5MHA: 	INITIAL HEIMAP
       CYCLIC  CURRNT,DRIFT
       CYCLE   5M

G5MHB: 	INITIAL HEIMAP
       CYCLIC  DRIFT
       CYCLE   5M

G5MA: 	INITIAL CURRNT

CYCLIC CURRNT,DRIFT

       CYCLE   5M

G5MB: 	INITIAL CURRNT

CYCLIC DRIFT

       CYCLE   5M

G34HA: 	INITIAL HEIMAP
       CYCLIC  CURRNT,DRIFT
       CYCLE   34

G34HB: 	INITIAL HEIMAP
       CYCLIC  DRIFT
       CYCLE   34

G34A: 	INITIAL CURRNT

CYCLIC CURRNT,DRIFT

       CYCLE   34

G34B: 	INITIAL CURRNT

CYCLIC DRIFT

       CYCLE   34

G1HA: 	INITIAL HEIMAP
       CYCLIC  CURRNT,DRIFT
       CYCLE   1

G1HB: 	INITIAL HEIMAP
       CYCLIC  DRIFT
       CYCLE   1

G1A: 	INITIAL CURRNT

CYCLIC CURRNT,DRIFT

       CYCLE   1

G1B: 	INITIAL CURRNT

CYCLIC DRIFT

       CYCLE   1

HEICU: 	INITIAL HEIMAP,CURRNT

HCD: 	INITIAL HEIMAP

CYCLIC CURRNT,DRIFT CYCLE 30M

CD: 	INITIAL CURRNT

CYCLIC DRIFT CYCLE 30M

FT01: 	INITIAL CURRNT

CYCLIC CURRNT,DRIFT CYCLE 5M,F

LONG03: INITIAL CURRNT,INITBE,PDEFBE,SUBDEFBE
       CYCLIC  CURRNT,DRIFT,INITBE,PDEFBE,SUBDEFBE
       CYCLE   5M,F

HEI: INITIAL HEIMAP
       CYCLIC  CURRNT
       CYCLE   10M

DRF5M: 	INITIAL CURRNT,HEIMAP

CYCLIC CURRNT,DRIFT CYCLE 5M,F

DTU5M:  INITIAL  HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE
	CYCLIC  CURRNT,DRIFT
       CYCLE   5M,F

CUR:    INITIAL CURRNT	
       CYCLIC  CURRNT
       CYCLE   30M