Template:Peg2TableCAddrowColors

! rowspan="2" | {{{RecipeName}}} | colspan="39" | {{{PriorProcessSteps}}} | rowspan="2" style="background:cornsilk; color:black;" |{{{BGC-EM-EPD}}} | rowspan="2" | {{{Link2RecipeRun}}} ! rowspan="2" | {{{Keywords}}} |- |style="background:gainsboro; color:black;" |{{{PlatenPositionFrequency}}} |style="background:lightgrey; color:black;" |{{{StabilisationTime}}} |style="background:silver; color:black;" |{{{StartCycleEndCycle}}} |style="background:darkgray; color:black;" |{{{DepositionTime}}} |style="background:gray; color:white;" |{{{EtchTime}}} |style="background:dimgray; color:white;" |{{{NumberOfCycles}}} |style="background:greenyellow; color:black;" |{{{PressureDepDelay}}} |style="background:chartreuse; color:black;" |{{{PressureDepBoost}}} |style="background:lawngreen; color:black;" |{{{PressureDepMain}}} |style="background:mediumspringgreen; color:white;" |{{{PressureEtchDelay}}} |style="background:seagreen; color:white;" |{{{PressureEtchBoost}}} |style="background:forestgreen; color:white;" |{{{PressureEtchMain}}} |style="background:red; color:black;" |{{{SF6-1Dep}}} |style="background:red; color:white;" |{{{SF6-1Etch}}} |style="background:blue; color:black;" |{{{SF6-2Dep}}} |style="background:blue; color:white;" |{{{SF6-2Etch}}} |style="background:rosybrown; color:black;" |{{{O2Dep}}} |style="background:rosybrown; color:white;"|{{{O2Etch}}} |style="background:moccasin; color:black;" |{{{ArDep}}} |style="background:moccasin; color:white;"|{{{ArEtch}}} |style="background:peachpuff; color:black;" |{{{N2Dep}}} |style="background:peachpuff; color:white;"|{{{N2Etch}}} |style="background:darkkhaki; color:black;" |{{{HeDep}}} |style="background:darkkhaki; color:white;"|{{{HeEtch}}} |style="background:cyan; color:black;" |{{{WCoilDep}}} |style="background:darkturquoise; color:white;" |{{{WCoilEtch}}} |style="background:lavender; color:black;" |{{{WPlatenDep}}} |style="background:mediumorchid; color:white;"|{{{WPlatenEtchDelay}}} |style="background:mediumpurple; color:white;"|{{{WPlatenEtchBoost}}} |style="background:blueviolet; color:white;"|{{{WPlatenEtchMain}}} |style="background:cyan; color:black;"|{{{%CoilDepLoad}}} | {{{%CoilDepTune}}} |style="background:darkturquoise; color:white;"|{{{%CoilEtchLoad}}} | {{{%CoilEtchTune}}} |style="background:lavender; color:black;"|{{{%PlatenDepLoad}}} | {{{%PlatenDepTune}}} |style="background:purple; color:white;"|{{{%PlatenEtchLoad}}} | {{{%PlatenEtchTune}}} |style="background:darkorange; color:white;" |{{{Temperature}}} |-