Specific Process Knowledge/Etch/Overview of chemicals

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Chemical	Concentration	Comment
Performance	TextB1	DetailB1.1 DetailB1.2 DetailB1.3
	TextB2	DetailB2.1 DetailB2.2 DetailB2.3
Process parameter range	TextC1	DetailC1.1 DetailC1.2 DetailC1.3
	TextC2	DetailC2.1 DetailC2.2 DetailC2.3
Substrates	TextD1	DetailD1.1 DetailD1.2 DetailD1.3
	TextD2	DetailD2.1 DetailD2.2 DetailD2.3
	TextD3	DetailD3.1 DetailD3.2 DetailD3.3