Specific Process Knowledge/Lithography/EBeamLithography/eLINE
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Process information for the Raith eLINE Plus system
Table of dose to clear
| Dose µC/cm2] | AR-P 6200.09 (180 nm)] | PMMA 950k] | AR-N 8200.xx] | |
|---|---|---|---|---|
| 10 kV | ||||
| 20 kV | ||||
| 30 kV | ||||
| Hardware options | ? |