Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/DREM
The DREM 0.5kW v2.3 recipe is in the standard recipe folder.
| Recipe | General | Pressure | Gases | Generators | Matching | Tem- pera- ture | Results | |||||||||||||||||||||||||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| C4F8 | SF6 | Ar | Coil | Platen | Coil | Platen | ||||||||||||||||||||||||||||||||||||||
| Platen | Stb | S/E | Dp | Et | Cyc | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Dp | Et | Runs | Keywords | |||||||||||||||||||||
| U/D | H/L | D | B | M | D | B | M | D | B | M | D | B | M | D | B | M | D | B | M | D | B | M | L | T | L | T | L | T | L | T | ||||||||||||||
| DREM 0.5kW v2.3 | Clamp Substrate,Pump to base, home platen matching unit, barc1, stab | 10+ | ||||||||||||||||||||||||||||||||||||||||||
| U | HF | D/E | 3 | 2.5 | 100% | 100% | 0.3@5 | 0.5@10 | 45 | 0.3@25 | 5 | 0.3@20 | 0.5@10 | 10 | 1.9@20 | 0.5@30 | 30 | 75 | 1.5@75,75 | 0.5 | 0.5 | 1 | 0.9@1 | 1@40 | 1 | 45 | 50 | 45 | 50 | 41 | 60 | 41 | 60 | 0 | ||||||||||
10+