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Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/Cretch
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Specific Process Knowledge
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Etch
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DRIE-Pegasus
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Pegasus-2
Revision as of 09:45, 13 September 2021 by
Jmli
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A quasi atomic layer etching of chromium. Read more on
Cr and CrO
x
etching using SF
6
and O2 plasma
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