Jump to content

Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-2/TemperatureSettings

From LabAdviser

< Specific Process Knowledge‎ | Etch‎ | DRIE-Pegasus‎ | Pegasus-2

Revision as of 15:36, 15 December 2020 by Jmli (talk | contribs)

(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)

Correct settings for temperatures on Pegasus 2

The Platen chiller temperature is enabled and the setpoint is 20 degrees. This setting could be applied to all the

Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-2/TemperatureSettings&oldid=37844"