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nano1.42 versus pxnano2
Recipe
|
nano1.42
|
pxnano2
|
Tool
|
Pegasus
|
ASE
|
Parameters
|
Gas
|
C4F8 75 sccm, SF6 38 sccm
|
D: C4F8 50 sccm
|
E: C4F8 50 sccm, SF6 50 sccm
|
Power
|
800 W CP, 40 W PP
|
D: 500 W CP
|
E: 350 W CP, 30 W PP
|
Pressure
|
4 mTorr, Strike 3 secs @ 15 mTorr
|
10 mTorr
|
Temperature
|
-20 degs
|
20 degrees
|
Hardware
|
100 mm Spacers
|
?
|
Time
|
120 secs
|
D: 3 secs, E: 5 secs, total 12 cycles or 96 secs
|
Conditions
|
Run ID
|
2150
|
wf_2e09b_mar23
|
Conditioning
|
Sequence: Oxygen clean, MU tests, processes, no oxygen between runs
|
none
|
Mask
|
211 nm zep etched down to 80 nm
|
211 nm zep etched down to 130 nm
|
- The results
-
nano1.42: The 30 nm trenches etched 120 seconds
-
pxnano2: The 30 nm trenches etched 96 seconds
-
nano1.42: The 60 nm trenches etched 120 seconds
-
pxnano2: The 60 nm trenches etched 96 seconds
-
nano1.42: The 90 nm trenches etched 120 seconds
-
pxnano2: The 90 nm trenches etched 96 seconds
-
nano1.42: The 120 nm trenches etched 120 seconds
-
pxnano2: The 120 nm trenches etched 96 seconds
-
nano1.42: The 150 nm trenches etched 120 seconds
-
pxnano2: The 150 nm trenches etched 96 seconds
nano1.42 on the Pegasus
Nominal trench line width
|
'
|
30
|
60
|
90
|
120
|
150
|
Average
|
Std. dev.
|
Etch rates |
nm/min |
149 |
161 |
166 |
169 |
170 |
163 |
9
|
Sidewall angle |
degs |
91 |
91 |
90 |
90 |
90 |
90 |
0
|
CD loss |
nm/edge |
3 |
-11 |
-12 |
-34 |
-36 |
-18 |
17
|
CD loss foot |
nm/edge |
9 |
1 |
1 |
-20 |
-9 |
-4 |
11
|
Bowing |
|
4 |
4 |
2 |
6 |
2 |
4 |
2
|
Bottom curvature |
|
-46 |
-40 |
-37 |
-31 |
-23 |
-35 |
9
|
zep |
nm/min |
|
|
|
|
|
66 |
|
pxnano2 on the ASE
Nominal trench line width
|
'
|
30
|
60
|
90
|
120
|
150
|
Average
|
Std. dev.
|
Etch rates |
nm/min |
215 |
232 |
240 |
243 |
244 |
235 |
12
|
Sidewall angle |
degs |
90 |
89 |
89 |
89 |
89 |
89 |
0
|
CD loss |
nm/edge |
1 |
-10 |
-11 |
-33 |
-33 |
-17 |
15
|
CD loss foot |
nm/edge |
6 |
2 |
1 |
-19 |
-6 |
-3 |
10
|
Bowing |
|
4 |
2 |
4 |
3 |
1 |
3 |
1
|
Bottom curvature |
|
-36 |
-29 |
-22 |
-19 |
-17 |
-25 |
8
|
zep |
nm/min |
|
|
|
|
|
51 |
|
|