Specific Process Knowledge/Thin film deposition/Sputter deposition of metals and alloys

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Sputter deposition of metals and alloys

Many metals and some alloys are well suited for sputter deposition. This page is a collective page for metals and alloys that we do not deposit by any other methods. Below you can compare the sputter systems available here at Nanolab for depositing them.

Metals which have been sputter deposited here at Nanolab and which cannot be deposited here by e-beam or thermal evaporation include: Cobalt Iron

Alloys which may be sputter deposited here at Nanolab include: Al-Cu Co-Fe Cu-Ti Fe-Mn Mn-Ir (deposited several times with the Sputter-System (Lesker), see log) Nb-Ti (deposited several times with the Sputter-System (Lesker), see log) Ni-Co Ni-Fe (deposited several times with the Sputter-System (Lesker), see log) Ni-V (extensively deposited with the Sputter-System (Lesker), see log, and with the Wordentec, see process log) Ti-W alloy (10%/90% by weight) (extensively deposited with the Sputter-System (Lesker), see log, and with the Wordentec, see process log)

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