LabAdviser/Courses/TPT Dry Etch

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The Dry Etch TPT

DTU Nanolab offers a Tool Package Training in dry etching; the course includes theory on dry etching and equipment, as well as training in equipment operation in the cleanroom.

The course is for all users who intend to perform any kind of plasma dry etching in the cleanroom, and is a prerequisite for training in any of the plasma dry etch equipment's.


Dry Etch Tool Package Training
Schedule

Theoretical part

  • A 3-hour lecture. The lecture is on videos. the videos can be found on YouTube, see link below. You can also find the slides with notes below. It can be helpful to print out the lecture slide for your notes and questions while watching the videos. After seeing the videos you need to go though a quiz (assignment). You will get a link to the quiz when signing up for the Question&Evaluation session (1-1½ hour), max. 3 persons per session, Please sign up via: Dry Etch TPT Lecture doodle. The Question&Evaluation session takes place in room: 347-078 normally. At the moment we can do the Question&Evaluation session online.

Practical part

  • A 2 hour training session, max. 3 persons per session will be planed after the Question&Evaluation session. Before this you need to watch the "Pre hands-on training videos"
Location

Theoretical part (the question&evaluation session)

  • Room: 347-R078 (or Zoom)

Practical part

  • The training session takes place inside the cleanroom. The meeting point will be in The gowning area.
Qualified Prerequisites
  • Cleanroom safety course at DTU Nanolab
  • Admission to the cleanroom must be obtained before the training session
Preparations

Before the Question&Evaluation session

  • Watch the lecture videos, see link to the videos below. And go though the quiz (assignment).
  • If you are not familiar with dry etching we advice you to read through the "Lecture slides with explanatory text included" File:TPT Dry etching April2018 with notes.pdf before or after watching the videos and during answering the quiz.

Before training session

  • Watch the training video: TPT hands-on intro
  • Watch the screen cast video's for the ASE/AOE software
  • Watch the screen cast video's for the DRIE/ICP metal and III-V ICP

These are on YouTube and you can find a link to the videos below

Course Responsible

The Dry Etch Group at DTU Nanolab

  • Jonas Michael-Lindhard
  • Berit Herstrøm

If you have questions you can contact us by e-mailing dryetch@nanolab.dtu.dk.

Learning Objectives
  • Know why and when to use dry etching
  • Use the dry etchers without harming the machines
  • Select the right instrument to use for his/her dry etch processing
  • Select an appropriate etch recipe for his/her dry etch processing
  • Spot when the recipe needs to be tuned for his/her needs and
  • Suggest relevant tuning parameters


Material for preparations and further information

Literature

  • No extra Literature at the moment

Slides from Lecture

Lecture videos
(Watch before the question and evaluation session)

Pre hands-on training videos
(Watch before the hands-on training)


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