Specific Process Knowledge/Characterization

Choose topic

• Surface imaging
• Topographic measurement
• Stress measurement
• Filmthickness measurement
• Element analysis
• Measurement of optical constants
• Hydrophobicity measurement
• Resistivity measurement
• Wafer thickness measurement

Choose equipment

• SEM: Scanning Electron Microscopy
• AFM: Atomic Force Microscopy
• Profiler Tencor
• Optical microscope
• Optical characterization ellipsometer - Filmtek - prismcoupler
• SIMS: Secondary Ion Mass Spectrometry
• Dektak stylus profiler
• Drop shape analyser
• 4-point probe
• Stylus thickness measure