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FIB-SEM

Dual-beam Electron Microcopes - Focused Ion Beam and Scanning Electron Microscope (FIB-SEM) is the combination of SEM and a focused ion beam. In SEM, a focussed beam of accelerated electrons is scanning over a sample. Electrons which are backscattered or secondary generated electrons are collected on a detector. Dependenging on the type of detector, different signals and sample characteristics can be acquired. The Electron beam is steered by electromagnetic and electrostatic lenses.

The FIB are Ga-ions, which are accelerated towards the sample. The beam can be used for imaging, but also for sputtering off material of the sample. The Ion beam uses only electrostatic lensing and we can detect SE and Secondary Ions from the sample.

We have one FIB-SEM available at DTU Nanolab. Click on the instrument to find more information about the equipment and available techniques:


Helios