Specific Process Knowledge/Characterization/XPS/Access
How to get access to the XPS
To be trained on the XPS tools you must complete the access request form following the link below: K-Alpha training
Theoretical background material
The course material of an XPS course offered at the Technical University of Munich explains the theory behind XPS. Read sections 1-4.3 (pages 1-16) of File:Electron Spectroscopy of surfaces.pdf.