Specific Process Knowledge/Thin film deposition/Deposition of Germanium

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Deposition of Germanium

Germanium can be deposited by thermal evaporation and e-beam evaporation.

Thermal deposition


Ge deposition equipment comparison


Thermal evaporation (Wordentec) E-beam evaporation (Physimeca) E-beam evaporation (Temescal)
General description Thermal deposition of Ge E-beam deposition of Ge E-beam deposition of Ge
Pre-clean RF Ar clean - Ar ion beam clean
Layer thickness 10Å to about 2000Å (in total distributed on all loaded wafers) 10Å to about 3000Å 10Å to about 1000 nm
Deposition rate From 0.4 Å/s up to about ~2Å/s 5 Å/s From 1 Å/s up to 5 Å/s
Batch size
  • 24x 2" wafers or
  • 6x 4" wafers or
  • 6x 6" wafers or

Many small pieces

  • 1x 2" wafer or
  • 1x 4" wafers or
  • Several smaller pieces
  • Up to 4 x 6" wafer or
  • 3x 8" wafers (ask for special holder)
  • Many smaller pieces
Allowed substrates
  • Silicon wafers
  • Quartz wafers
  • Pyrex wafers
  • III-V materials
  • Silicon wafers
  • Quartz wafers
  • Pyrex wafers
Allowed materials
  • Silicon oxide
  • Silicon (oxy)nitride
  • Photoresist
  • PMMA
  • Mylar
  • SU-8
  • Metals
  • Silicon oxide
  • Silicon (oxy)nitride
  • Photoresist
  • PMMA
  • Mylar
Comment Recommended for unexposed e-beam resist