Specific Process Knowledge/Characterization/Probe station
Probe station
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The Probe station is a - EPS150Triax - Cascade. The purpose is to measure I/V measurement, ohmic measurements etc. It has 4 individually adjustable triax connected probes, but can be fitted with additional coax connected probes. The stage can be moved in x and y to step and repeat a measurement over a large number of chips.
Samples can be inspected by either a microscope and/or a camera.
Two Keithley 2450 source meters are connected to the probe station by triax cables. An additional Keithley 2410 source meter and a Keithley 2000 multi meter is connected by coax cables. All Keithleys can also be connected with banana wires.
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Purpose |
Electrical measurements |
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Performance |
Pad size |
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Substrates |
Batch size |
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| Substrate materials allowed |
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The user manual, technical information and contact information can be found in LabManager: