Specific Process Knowledge/Etch/DRIE-Pegasus/picoscope
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Revision as of 12:42, 17 March 2020 by Jmli (talk | contribs) (→Process optimization using the Picoscope)
Process optimization using the Picoscope
The Pegasus tools were delivered with a set of standard recipes
- 4 cycles of Process A
- 4 cycles of Process D4